2006 TEL ACT 12

HDD is not included

Coater/Developer

Wafer Size 300mm

・

Composition

Main

Body, AC Power Box,

Chemical Cabinet, TCU

・

Cup Configuration

PCT 2 Cup, DEV 2 Cup

・

Heater Configuration

HHP 4ea, HEL 5ea, CPL 5ea,

TRS 3ea, THS 1ea, SBU 2ea,

WEE 1ea

・

Stepper Canon type

・

Failure/Missing parts None

※HDD is not included