Novellus C2 Altus spare parts, Sabre spare parts

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NOVELLUS


OEM
TOOL TYPE
# of Units
TARA PART #
PART NAME
Part Number


NOVELLUS
C2 ALTUS
4
100303
ASSY,VENT PURGE
02-834770-00


NOVELLUS
C2 ALTUS
19
100304
IO CONTROLLER
27-10157-00


NOVELLUS
C2 ALTUS
3
100310
LOCD LOCK DOOR ACTUATOR LEFT ASSY



NOVELLUS
C2 ALTUS
3
100311
LOCD LOCK DOOR ACTUATOR LEFT ASSY



NOVELLUS
C2 ALTUS
5
100312
VAT VALVE ASSY
02-115275-00


NOVELLUS
C2 ALTUS
4
100314
VAT VALVE ASSY
02-115274-00


NOVELLUS
C2 ALTUS
3
100317
TYLAN GENERAL ADAPTORR MODEL AC2
27-053667-00


NOVELLUS
C2 ALTUS
4
100319
PNEUMATIC SOLENOID ASSY
02-828715-00


NOVELLUS
C2 ALTUS
4
100320
ASSY,FLAT PNL DISPP PWR
02-041243-00


NOVELLUS
C2 ALTUS
4
100321
INDEXER END EFFECTOR
15-055682-00


NOVELLUS
C2 ALTUS
4
100322
INDEXER END EFFECTOR
15-110374-01


NOVELLUS
C2 ALTUS
4
100324
LEFT LOADLOCK INTFC PCB
03-034719-00


NOVELLUS
C2 ALTUS
4
100325
RIGHT LOADLOCK INTFC PCB DLCM-S
03-034720-00


NOVELLUS
C2 ALTUS
4
100326
BOARD,VALVE,RLL,DLCM/HILO
60-10131-00


NOVELLUS
C2 ALTUS
3
100327
BOARD,VALVE,LLL,DLCM/HILO
60-10130-00


NOVELLUS
C2 ALTUS
3
100328
KEYENCE ASSY
02-834711-00


NOVELLUS
C2 ALTUS
3
100329
TEACH PENDANT



NOVELLUS
C2 ALTUS
1
100330
DLCM POWER CONTROL ASSY
C2-DLCM-S0790


NOVELLUS
C2 ALTUS
2
100331
ADVANCE POWER SUPPLY



NOVELLUS
C2 ALTUS
2
100332
POWER SUPPLY



NOVELLUS
C2 ALTUS
5
100333
POWER SUPPLY



NOVELLUS
C2 ALTUS
1
100334
POWER SUPPLY



NOVELLUS
C2 ALTUS
1
100335
POWER SUPPLY



NOVELLUS
C2 ALTUS
4
100338
VOLGEN ESK70U-1515
ESK70U-1515


NOVELLUS
C2 ALTUS
1
100339
FLAT SCREEN NATIONAL DISPLAY SYSTEMS DM-3S12/ZN
DM-3S12/ZN

NOVELLUS
C2 ALTUS
2
100404
I/O CONTROLLER
27-10157-00


NOVELLUS
C2 ALTUS
8
100405
CONTROLLER
02-810123-00


NOVELLUS
C2 ALTUS
8
100407
PNEUMATIC PANEL
02-810546-00


NOVELLUS
C2 ALTUS
7
100408
POWER & SIGNAL INTERFACE BOX
03-10766-00


NOVELLUS
C2 ALTUS
6
100410
SETRA DATUM 2000
SETRA DATUM 2000 METER


NOVELLUS
C2 ALTUS
2
100411
CVD-W LPB/UPS
02-810540-10


NOVELLUS
C2 ALTUS
6
100412
VOLGEN EXU-156R6
EXU-156R6


NOVELLUS
C2 ALTUS
4
100413
VOLGEN EXU-246R3
EXU-246R3


NOVELLUS
C2 ALTUS
4
100415
VOLGAN SX100U-15S
SX100U-15S


NOVELLUS
C2 ALTUS
1
100416
CVD-W GAS BOX
02-824316-01


NOVELLUS
C2 ALTUS
6
100427
BROOKS 5866 RT SERIES PRESSURE CONTROLLER
22-10502-00


NOVELLUS
C2 ALTUS
35
100429
CARDWELL 154-30-1



NOVELLUS
C2 ALTUS
27
100441
PLATE MTG PED
16-032558-00


NOVELLUS
C2 ALTUS
5
100445
PLATE,MOUNTING,PED
16-032609-00


NOVELLUS
C2 ALTUS
15
100446
ASSY PIN LIFT 1 AND 2
02-00470


NOVELLUS
C2 ALTUS
1
100450
NDEXER, WAFER,EXCLUSION OPTION,200MM
15-00934-02


NOVELLUS
C2 ALTUS
1
100453
MANIFOLD RING



NOVELLUS
C2 ALTUS
5
100456
CVDW INTERLOCK ASSY PCB 03-810748-00
03-10748-00


NOVELLUS
C2 ALTUS
3
100457
DLCM-LITE LOCAL POWER BOX B/O BOARD
02-021383


NOVELLUS
C2 ALTUS
7
100458
GAS BOX PCB
03-10738-00


NOVELLUS
C2 ALTUS
7
300095
COMP CONT,P100/16M
02-834310-00


NOVELLUS
C2 ALTUS
2
300098
CONTROLLER PM 250
233-4148-86


NOVELLUS
C2 ALTUS
1
300107
I/O CONTROLLER
27-810157-00


NOVELLUS
C2 ALTUS
3
300108
TRANSPECTOR
TSP TH100


NOVELLUS
C2 ALTUS
1
300109
MODEL 4421 RF POWER METER
3509 / 4421


NOVELLUS
C2 ALTUS
1
300110
DIAGNOSTIC HUB
10087285


NOVELLUS
C2 ALTUS
3
300111
VAT VALVE ASSY
02-115275-00


NOVELLUS
C2 ALTUS
1
300112
VAT VALVE ASSY
02-115274-00


NOVELLUS
C2 ALTUS
1
300116
PCB
001-5526-01


NOVELLUS
C2 ALTUS
1
300117
CVD-W INTERLOCK
03-10748-00


NOVELLUS
C2 ALTUS
3
300119
C2 HEATER PEDESTAL
02-033134-00


NOVELLUS
C2 ALTUS
5
300422
POWER SUPPLY
ESK70U-1515


NOVELLUS
C2 ALTUS
2
300423
POWER SUPPLY
EXU-246R3


NOVELLUS
C2 ALTUS
12
300424
MODULE CONTROLLER P100
02-034310-00


NOVELLUS
C2 ALTUS
5
300426
ARMS



NOVELLUS
C2 ALTUS
1
300427
HEAT EXCHANGER
0221-10821


NOVELLUS
C2 ALTUS
1
300429
MOER 2.25MM
500027083


NOVELLUS
C2 ALTUS
1
300432
POWER SUPPLY 12V
233-2215-46


NOVELLUS
C2 ALTUS
1
300433
AC POWER INPUT
233-2219-92


NOVELLUS
C2 ALTUS
2
300434
POWER SUPPLY & CIRCUIT BREAKER



NOVELLUS
C2 ALTUS
5
300435
PM SERVO MOTORS
JGHT-4921-2


NOVELLUS
C2 ALTUS
1
300460
POWER ONE POWER SUPPLY
PFC500-1024


NOVELLUS
C2 ALTUS
3
300461
TRANSPECTOR
TSP TH100


NOVELLUS
C2 ALTUS
17
300462
MOER RINGS 2.5



NOVELLUS
C2 ALTUS
1
300463
INDEXER TONGS



NOVELLUS
C2 ALTUS
1
300464
PNEUMATIC BOARD
02-810546-00


NOVELLUS
C2 ALTUS
1
300466
POWER SUPPLY
EXU-246R3


NOVELLUS
C2 ALTUS
1
300468
RIGHT LOADLOCK INTFC PCB
03-834720-00


NOVELLUS
C2 ALTUS
2
300469
CVD-W INTERLOCK
03-10748-00


NOVELLUS
C2 ALTUS
4
300470
I/O CONTROLLER
27-810157-00


NOVELLUS
C2 ALTUS
6
300471
INTF CVD-W & ETCH
03-10355-00


NOVELLUS
C2 ALTUS
2
300474
ASSY,LWR SPINDLE
03-810534-02


NOVELLUS
C2 ALTUS
1
400036
GSNX New Elevator Alignment Tool



NOVELLUS
C2 ALTUS
5
100406
ASSY VACUUM UTILITIES WEVD
02-810131-00


NOVELLUS
CVD
2
700661
PEDESTAL
050-01-912-0100


NOVELLUS
CVD
1
700698
DEGAS ASSY QUAD 4 CHANNEL
02-103445-00


NOVELLUS
CVD
1
700699
SERIES 11 BOARD
3200-1065-01


NOVELLUS
CVD
1
700701
DIRECTIONAL POWER SENSOR
4025


NOVELLUS
CVD
2
700702
SENSOR INTEGRATION PLATFORM
TWSPK001


NOVELLUS
SABRE
1
700839
HEATER PEDESTAL
02-287781-00


NOVELLUS
SABRE
1
700847
HOST PORT CONTROL
27-260607-00N


NOVELLUS
SABRE
1
700848
CONTROL BOX
03-056905-00


NOVELLUS
SABRE
1
700849
CONTROL BOX
119370R


NOVELLUS
SABRE
1
700850
PLATFORM CONTROLLER
02-168112-00


NOVELLUS
SABRE
3
700851
PLATFORM CONTROLLER
02-257935-00


NOVELLUS
SABRE
2
700853
VECTOR DRIVE
27-130440-00


NOVELLUS

2
900961
CPW 6/480
04-722791-02


NOVELLUS
CVD
1
700592
HOIST AND CRANE FOR VACUUM ROBOT
79-169649-00


NOVELLUS
CVD
3
700584
HEATER PEDESTAL
02-145733-00N


NOVELLUS
CVD
48
700585
MOUNT DRIVE SHAFT RF ENCLOSERE
15-344507-00


NOVELLUS
CVD
2
700586
FIXTURE BLANK LEFT LTM VCTR
72-252834-02


NOVELLUS
CVD
1
700587
FIXLOAD ALIGNMENT PDO
72-254110-00


NOVELLUS
CVD
2
700588
FIXTURE BLANK RIGHT LTM VCTR
72-252834-01


NOVELLUS
CVD
2
700589
POWER METER
4421


NOVELLUS
CVD
2
700590
BAR CENTRE PLANE
15-155151-00


NOVELLUS
CVD
1
700591
COVER PROTECTIVE PM
15-251882-00


NOVELLUS
CVD
1
700593
HOIST AND CRANE
E20-13087-05-000


NOVELLUS
CVD
2
700594
DUCT
16-177756C01


NOVELLUS
CVD
5
700595
TOOL SUSCEPTOR
16-185099D01


NOVELLUS
CVD
2
700596
EXHAUST FLANGE
0513012-107


NOVELLUS
CVD
1
700598
PEDESTAL
02-159684-00N


NOVELLUS
CVD
1
700605
PEDESTAL
02-145732-00N


NOVELLUS
CVD
1
700632
AMP PWB PCB
13-406263-01


NOVELLUS
CVD
2
700649
PEDESTAL
02-176383-00


NOVELLUS
CVD
1
700659
PEDESTAL
050-01-912-0100


NOVELLUS
CVD
1
700700
MFC FC-7820C
22-133312-00