2002 ASML PAS5500/750

ASML PAS5500/750 DUV Scanner

Includes main body, operator console, wafer transfer system, SMIF interface, Cymer laser, sub-fab cabinets (C&T, transformer, ACC fan, Donaldson filter).

Software version 8.9.0.C, SECS/GEM CIM interface.

Currently connected in fab

Sold as-is; inspection recommended.

1. Lens type: 750F
2. Cymer Laser model number: ELS-6600
3. Cymer Laser serial number plate : OOCD664610

Lens is in excellent condition, illumination is above spec so the Cymer laser is in very nice condition.