2007 CDE ResMap 273

300mm

Resistivity Measurement

- Manufacturer: Creative Design Engineering  

- Model: ResMap 273 

- PC w/ windows XP

- Maximum Throughput: 1 minute per wafer

- Measurement Range: 2 mΩ/- 5 MΩ/

- Minimum Edge Exclusion: 1.5mm 

- Mapping Patterns: Polar Map, Rectangular map, Line Scan 

- Plots: Contour, Histogram, 3D, Line,Data Map, Data Sequence, Radial and Angular Distributions 

- AC Power: 100V to 240V < 10 KVA

- Tool Dimensions: 15" x 18"D x 10H