2013 Suss Microtec Gamma

Suss Microtec Gamma coater x2

• Year built: November 2015
• 2-bowl coater (dual resist coating pots)
• Hot plate stack (bake plates)
• Cold plate stack (cooling plates)
• Contactless centering (non-contact wafer alignment)
• SUSS CPD (spin develop module)
• Sankyo dual-arm robot
• 4-station I/O (four load/unload ports)

• Year built: November 2013
• 2-bowl coater (dual resist coating pots)
• Hot plate stack (bake plates)
• Cold plate stack (cooling plates)
• Contactless centering (non-contact wafer alignment)
• SUSS CPD (spin developer)
• Sankyo dual-arm robot
• 4 load ports / I/O stations