2023 LAM 2300 3 Chambers Etch System Including Exelan Flex45 Dielectric Etch Chamber

Installed.

Unused Since Installation/Qualification

However, since it has been stored under constant temperature and humidity conditions, the condition is very good.

It’s in Working Condition.

It’s complete with HDD and Software included.

Process Capabilities : Dielectric Etch/Metal Etch/Microwave Strip

Wafer : Set Up for 200 mm (Maximum 300 mm) 12"

Vintage : 2023

CE Mark

All Pumps, Generators & Other Subsystems Included

It can be dismantled immediately.

3 Chambers (Insulating Film, Metal, Ashing)

Gases used: Insulating Film (C4F8, CF4, CH3F), Metal (Cl2, BCl3)

Chambers are :

2300 Platform V2 Etch Transfer Module

3ea 200mm Open Cassette Loadports

Front & Side User Interface Monitors

CDM Wafer Handling Robot

2300 Exelan Flex45 Dielectric Etch Process Module

OES 2 End Point Detection

Low Temperature ESC

Boce 2700 LPM Turbo Pump

16 Regulated Gas Channels

Versys HP Metal Etch Process Module

OES 2 End Point Detection

Boce 2200 LPM Turbo Pump

16 Regulated Gas Channels

Microwave Stripper Process Module

On Board Gas System

3 Regulated Gas Channels