1991 AMAT P5000

Equipment Type   : P5000

Equipment production time   : APRIL, 1991

Wafer size   : 6inch

Wafer Type   : JMF

Heater Type   : P-chuck

Chamber Type  : DLH

Process Type   : TEOS

Missing part list:

FRONT

RIGHT LL assembly

controller box#1

SBC

SEI

VIDEO

DI/O#3

DI/O#4

controller box#2

 +15V PS

AI MUX

OPTO#1

Mainframe Top

Storage Elevator motor

TM robot blade

TM robot lower home sensor

Chamber A

C.M gauge

Throttle valve