1997 AMAT Endura 5500 Aluminum Interconnect

PVD (Physical Vapor Deposition)

Deposition Equipment

Date of Manufacture: 1997-12-31

Currently Configured for: 200mm

Turnkey Option is Available!

This system can be fully refurbished and reconfigured to meet customer specifications.

Software: v8.89

Mainframe: Endura 5500

Robot: HP with Fabworx Blade, Wrist, and Arms

Chambers:

Ch1/Ch3 - AlCu

Narrow Body

Pedestal - A101

ChE/ChF - Orient Degas

Auxiliaries:

Qty 1 - Neslab 2 HX

Qty 2 - CTI 9600 Cryo Compressor

Edwards IQDP40/QMB250 Rough Pump

MFCs:

Stec 440 - 12

Horiba Z500 - 2

No Missing Parts

Damage: One of the Cryo Compressor covers has a hole, but no signs of damage to the internals.