KLA/ SPTS CPX Pegasus

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Currently Configured for: 200mm

DSIE

Software: CP0148

MF: CPX

x2 Pegasus

ESC - Ceramic

8- SENSIRION MFC's

Ar,O2,SF6, C4F8, N2 

Brooks MagnaTran 7

Dry Pumps:

1-DS80, 2-DS700

Chillers:

1-HRZ001-L2-DV,

 2-HRZ001-L-D