1997 Nikon i12D
1997 Nikon i12D
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Description
-i-Line stepper
-Reticle: 6”
-Lamp power: 824 mW/cm2
-Uniformity: 0.9%
-TFD: 0.299 μm
-Astigmatism: 0.147 μm
-Stepping 3 sigma: X:16nm, Y:17nm
-1997 vintage.
Specifications
| Manufacturer | Nikon |
| Model | i12D |
| Year | 1997 |
| Condition | Used |
| Stock Number | BM6834 |