1994 Varian VSE E500HP

AMAT/Varian E500HP (Midcurrentimplant) 

Wafer Size 150 mm

ConditionGood

Year of Manufacture1994

Power Requirements200-208 V 45-70 Hz 3 Phase

Spare parts list

E11005370 Accel PS. x1

E11000141/140 Analyser PS. TCR x1

E11000173B Accel Stack x1

E11030995 Source Standard x2

E11001669 Cassette Nest 8" x2

E11071590 Cassette Stand 8" Pedestal ASSY x2