1996 LAM TCP 9600SE
1996 LAM TCP 9600SE
Contact us for price
or
Call +353 (0) 87 192 1110
Description
Refurbished in 2024 and have not been put into production operation since the refurbishment.
The equipment is in excellent condition.
TCP 9600SE
1996
150mm
gas: Cl2, BCl3, SF6,N2, O2, Ar, CF4, H2O, He, CDA
+ Edwards TCU 40/80
Specifications
| Manufacturer | LAM |
| Model | TCP 9600SE |
| Year | 1996 |
| Condition | Refurbished |
| Stock Number | BM7301 |
| WAFER SIZE | 150mm |