2006 Accretech/TSK UF3000

Wafer size: 300mm

Asset HDD not included

Tool has been de-installed and is stored in an off-site warehouse.

No pictures provided. Please inspect to collect photos.

CONFIGURATIONS CHECK LIST AVAILABLE

A HF (Manipulator) has not been used for long time and its function has not been checked.

Missing or damaged parts: confirmed Micron's customized parts have been removed out of parts connected to a Test Head.

[Prober : main/loader]

UF3000

Vendor Tool Serial #F24002LA

Air: over 0.6M Pa

Vacuum: over -80 K Pa

Voltage: 200V AC Single Phase

Frequency: 50/60 Hz

Wirning: 2WIRE + Ground

Full Load:  AMPS 7.5A

MAIN BREAKER RATING: 10A

AMPERE RATING LARGEST MOTOR LOAD: 1.1A

INTERRUPT CURRENT: 14 KA A.I.C 

Hot & Cold chuck：Yes

Temp. Range :  -40℃ ～ +150℃

Accuracy: ±1℃

[Chiller]

SCU-600E Chiller included in tool.

Vendor Tool Serial #5DE06037A

Air: over 0.6M Pa

Input Volts: AC200C

Frequency: 50/60 Hz

Weight: 420Kg

Write Configuration: 2WIRE + GROUND

FLA: 36A

MAIN BREAKER RATING: 40A

INTERRUPT CURRENT: 14 KA A.I.C 

[a HF is a Manipulator or a Hinge Manipulator made by Accretech.]

MHF9000 Hinge included in tool.

Vendor Tool Serial #F01502LA

* Used to be Connected to Prober when An Advantest T5383 tester was connected with the Prober. The

A MHF9000 Hinge was not connected with tool