SSI Solaris 200 Rapid Thermal Processing System
SSI Solaris 200 Rapid Thermal Processing System
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Description
Rapid Thermal Processing System
Wafer size: 8"
4 MFCs
HMI is fairly current and running on a WinXP OS.
Specifications
| Manufacturer | SSI |
| Model | Solaris 200 Rapid Thermal Processing System |
| Condition | Used |
| Stock Number | BM1114 |