2005 Canon Surpass 320
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Description
Currently Configured for: 300mm
Asset HDD not included
Tool has been de-installed and is stored in an off-site warehouse.
MISSING OR DAMAGED Fab15 confirmed there were no missing or damaged parts.
TOOL WAS UPGRADED FROM SURPASS 300 TO SURPASS 320.
Chamber A]
Chamber type:Asher
Gas config. (sccm)=MFC full scale
H2/N2(2000),O2(5000)
MW 2.45GHz, max 5000W
Stage Material:Ceramic
Stage Heater max 300C
Dielectric Substance:Al + Al2O3
[Chamber B]
Chamber type:Asher
Gas config. (sccm)=MFC full scale
H2/N2(2000),O2(5000)
MW 2.45GHz, max 5000W
Stage Material:Ceramic
Stage Heater max 300C
Dielectric Substance:Al + Al2O3
Specifications
Manufacturer | Canon |
Model | Surpass 320 |
Year | 2005 |
Condition | Used |
Stock Number | BM1434 |