2005 Canon Surpass 320

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Description

Currently Configured for: 300mm

Asset HDD not included


Tool has been de-installed and is stored in an off-site warehouse.

MISSING OR DAMAGED Fab15 confirmed there were no missing or damaged parts.

TOOL WAS UPGRADED FROM SURPASS 300 TO SURPASS 320.


Chamber A]

Chamber type:Asher

Gas config. (sccm)=MFC full scale

H2/N2(2000),O2(5000)

MW 2.45GHz, max 5000W

Stage Material:Ceramic

Stage Heater max 300C

Dielectric Substance:Al + Al2O3


[Chamber B]

Chamber type:Asher

Gas config. (sccm)=MFC full scale

H2/N2(2000),O2(5000)

MW 2.45GHz, max 5000W

Stage Material:Ceramic

Stage Heater max 300C

Dielectric Substance:Al + Al2O3


Specifications

ManufacturerCanon
ModelSurpass 320
Year2005
ConditionUsed
Stock NumberBM1434