HITACHI S-9300

The mainframe has missing parts, but the other crates (Main Power Supply, Pump Rack, Load Port 1, Chiller, MH3000 Robot Controller, Mini Environment, Load Port 2, Display Unit) are all complete.

-Main Chamber

-Display Unit

-Load Port 1

-Mini Environment

-Chiller x2

-Pump Rack

-Load Port 2

-Main Power Supply

MH3000 Unit (Robot Controller)

OEM Model Description

The S-9300 is standard equipped with a laser interferometer stage for ultra-high target addressing precision, mini-environment and FOUP compatible loadports. Advanced automation scenarios like FOUP delivery by automatic material handling systems (AMHS) and single wafer identification can be supported.