Tegal 903
Tegal 903
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Description
Wafer Size: 6 inch
THEIS 903 DRY ETCH OXIDE
SF6-N2-CHF3-He-O2
Mass flow UNIT UFC1100A
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O2 50sccm
CHF3 50sccm
CF4 100sccm
SF6 100sccm
N2 225sccm
Pompa da vuoto 60L/min
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Transport Endunit Board: 99-247-XXX
Transport Endunits: CW1078-A03XX
RF generator: ACG10
Display Assembly CMXXXX-002XX
Terminal Assembly CD1165-001XX (non sono sicuro)
Clean Channel Installed
Specifications
| Manufacturer | THEIS |
| Model | 903.0 |
| Condition | Used |
| Stock Number | EV009 |