AMAT Producer SE 300mm 3 CHAMBER

AMAT Producer SE 300mm 3 CHAMBER

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Description

Platform Type   PRODUCER SE Application       STI-STI Wafer Size        300MM (12 INCH) Wafer Shape     SNNF Position A         (XH) SACVD SE TWIN Position B         (XH) SACVD SE TWIN Position C         (XH) SACVD SE TWIN Position A Process       (91) HARP HT USG STI Position B Process       (91) HARP HT USG STI Position C Process       (91) HARP HT USG STI WIP Delivery Type         OHT WIP DELIVERY PreAlignment and Centering       NONE Remote Control System Capable           YES Bay Distributed Stocker             NONE Docked E99 Reading Capability             YES Load Port Types           ENHANCED 25 WAFER FOUP V2 Load Port Operator Interface      STANDARD 8 LIGHT (plus one spare) Docking Flange Shield YES Ionizing Systems           NONE Air Intake Systems        TOP INTAKE E84 PIO Sensors and Cables     UPPER E84 SENSORS AND CABLES E99 Carrier ID    TIRIS WITH RF Operator Access Switch            YES OHT Light Curtain          LIGHT CURTAIN Carrier ID Host Interface             NO Fast Data Gateway Software      NO eDiagnostics     NONE Interface A        Yes iPUP     One iPUP for transfer and loadlock chambers Local Center Finder       YES Ozone Generator with Rack        ASTEX 8407 WITH SINGLE RACK System Heat Exchanger Qty      SMC H2000 AMAT HX Hoses and Manifolds             Micron Double Cooling Loop w/ Parker 919J Hoses HAPS Scrubber             NONE System Labels ENGLISH ONLY Lid        WITHOUT MICROMETERS Lid Mixing Insert            SWIRL Liner     UC Spacer Application        NOT APPLICABLE NDIR Endpoint Detector            YES HEATER V7 CHUCK      HEATER ASSEMBLY, V7 CHUCK, 300MM SACVD SV Door and Actuator, KLR9100 RPS Manifold, SACVD, Right    RPS Manifold, SACVD, Right RPS Manifold, SACVD, Left      RPS Manifold, SACVD, Left Rf Filter            CIP Rf Filter Heater Lift kit    Carrier Bracket, Dual pressure Heater Lift, SACVD RPS     Astron EX RPS Gas Pallet Type             K1S SURFACE MOUNT VERTICAL MFCs   UNIT 8565 4 Ra Max Scrubber Interface         NONE Local Liquid Line Heating           NOT APPLICABLE Gas Pallet         (300XH91) Gas Line 1        EMPTY Gas Line 2        O3 - 30.0SLM Gas Line 3        O2 - 30.0SLM Gas Line 4        EMPTY Gas Line 5        EMPTY Gas Line 6        EMPTY Gas Line 7        N2 - 50SLM Gas Line 8        N2_TEOS - 50.0SLM Gas Line 9        HE_TEOS - 30.0SLM Gas Line 10       N2 PURGE Gas Line 11       N2 PURGE Gas Line 12       NF3 - 7.0SLM Gas Line 13       N2 - 5.0SLM Gas Line 14       AR - 15.0SLM Gas Line 15       EMPTY Gas Line 16       EMPTY Liquid 1            EMPTY Liquid 2            LFM LF-A40M-A-EVD TEOS 7.0GPM 1/4FVCR-IN 1/8FVCR-O Liquid 3            LFM LF-A40M-A-EVD TEOS 6.0GPM 1/4FVCR-IN 1/8FVCR-O Injector1-TEOS VALVE, INJ. 208V TEPO/TEOS 150C STEC 2410A V-02H Injecto2r-TEOS VALVE, INJ. 208V TEPO/TEOS 150C STEC 2410A V-02H Injector3-EMPTY           EMPTY BLOCKER PLATE         BLOCKER, DD3328, SACVD 300MM FACEPLATE     FACEPLATE, 1.5D 12MIL .70THK, SACVD 300MM GASBOX          GAS BOX, REMOTE CLEAN, PRODUCER SE PUMPING RING            PUMPING RING, ASYMMETRIC, SACVD PRODUCER SE TOP LINER       TOP LINER, EC2, SACVD PRODUCER SE PUMPING CHANNEL, LEFT       PUMPING CHANNEL, ASYMMETRIC LEFT, SACVD PRODUCER SE PUMPING CHANNEL, RIGHT     PUMPING CHANNEL, ASYMMETRIC RIGHT, 300MM SACVD PRODUCER SE LIFT PINS         LIFT PIN 170 FIXED FLOATING 300MM PRODUCER SE LIFT RING         LIFT RING Fixed Floating 300MM PRODUCER SE LIFT HOOP, FIXED FLOATING   HOOP 140 FIXED FLOATING 300MM PRODUCER SE LIFT HOOP SCREW      SCREW PAN HEAD LIFT PIN LIFT HOOP WASHER    WASHER LIFT PIN Caps    Caps Lid        WITHOUT MICROMETERS Lid Mixing Insert            SWIRL Liner     UC Spacer Application        NOT APPLICABLE NDIR Endpoint Detector            YES HEATER V7 CHUCK      HEATER ASSEMBLY, V7 CHUCK, 300MM SACVD SV Door and Actuator, KLR9100 RPS Manifold, SACVD, Right    RPS Manifold, SACVD, Right RPS Manifold, SACVD, Left      RPS Manifold, SACVD, Left Rf Filter            CIP Rf Filter Heater Lift kit    Carrier Bracket, Dual pressure Heater Lift, SACVD RPS     Astron EX RPS Gas Pallet Type             K1S SURFACE MOUNT VERTICAL MFCs   UNIT 8565 4 Ra Max Scrubber Interface         NONE Local Liquid Line Heating           NOT APPLICABLE Gas Pallet         (300XH91) Gas Line 1        EMPTY Gas Line 2        O3 - 30.0SLM Gas Line 3        O2 - 30.0SLM Gas Line 4        EMPTY Gas Line 5        EMPTY Gas Line 6        EMPTY Gas Line 7        N2 - 50SLM Gas Line 8        N2_TEOS - 50.0SLM Gas Line 9        HE_TEOS - 30.0SLM Gas Line 10       N2 PURGE Gas Line 11       N2 PURGE Gas Line 12       NF3 - 7.0SLM Gas Line 13       N2 - 5.0SLM Gas Line 14       AR - 15.0SLM Gas Line 15       EMPTY Gas Line 16       EMPTY Liquid 1            EMPTY Liquid 2            LFM LF-A40M-A-EVD TEOS 7.0GPM 1/4FVCR-IN 1/8FVCR-O Liquid 3            LFM LF-A40M-A-EVD TEOS 6.0GPM 1/4FVCR-IN 1/8FVCR-O Injector1-TEOS VALVE, INJ. 208V TEPO/TEOS 150C STEC 2410A V-02H Injecto2r-TEOS VALVE, INJ. 208V TEPO/TEOS 150C STEC 2410A V-02H Injector3-EMPTY           EMPTY BLOCKER PLATE         BLOCKER, DD3328, SACVD 300MM FACEPLATE     FACEPLATE, 1.5D 12MIL .70THK, SACVD 300MM GASBOX          GAS BOX, REMOTE CLEAN, PRODUCER SE PUMPING RING            PUMPING RING, ASYMMETRIC, SACVD PRODUCER SE TOP LINER       TOP LINER, EC2, SACVD PRODUCER SE PUMPING CHANNEL, LEFT       PUMPING CHANNEL, ASYMMETRIC LEFT, SACVD PRODUCER SE PUMPING CHANNEL, RIGHT     PUMPING CHANNEL, ASYMMETRIC RIGHT, 300MM SACVD PRODUCER SE LIFT PINS         LIFT PIN 170 FIXED FLOATING 300MM PRODUCER SE LIFT RING         LIFT RING Fixed Floating 300MM PRODUCER SE LIFT HOOP, FIXED FLOATING   HOOP 140 FIXED FLOATING 300MM PRODUCER SE LIFT HOOP SCREW      SCREW PAN HEAD LIFT PIN LIFT HOOP WASHER    WASHER LIFT PIN Caps    Caps Lid        WITHOUT MICROMETERS Lid Mixing Insert            SWIRL Liner     UC Spacer Application        NOT APPLICABLE NDIR Endpoint Detector            YES HEATER V7 CHUCK      HEATER ASSEMBLY, V7 CHUCK, 300MM SACVD SV Door and Actuator, KLR9100 RPS Manifold, SACVD, Right    RPS Manifold, SACVD, Right RPS Manifold, SACVD, Left      RPS Manifold, SACVD, Left Rf Filter            CIP Rf Filter Heater Lift kit    Carrier Bracket, Dual pressure Heater Lift, SACVD RPS     Astron EX RPS Gas Pallet Type             K1S SURFACE MOUNT VERTICAL MFCs   UNIT 8565 4 Ra Max Scrubber Interface         NONE Local Liquid Line Heating           NOT APPLICABLE Gas Pallet         (300XH91) Gas Line 1        EMPTY Gas Line 2        O3 - 30.0SLM Gas Line 3        O2 - 30.0SLM Gas Line 4        EMPTY Gas Line 5        EMPTY Gas Line 6        EMPTY Gas Line 7        N2 - 50SLM Gas Line 8        N2_TEOS - 50.0SLM Gas Line 9        HE_TEOS - 30.0SLM Gas Line 10       N2 PURGE Gas Line 11       N2 PURGE Gas Line 12       NF3 - 7.0SLM Gas Line 13       N2 - 5.0SLM Gas Line 14       AR - 15.0SLM Gas Line 15       EMPTY Gas Line 16       EMPTY Liquid 1            EMPTY Liquid 2            LFM LF-A40M-A-EVD TEOS 7.0GPM 1/4FVCR-IN 1/8FVCR-O Liquid 3            LFM LF-A40M-A-EVD TEOS 6.0GPM 1/4FVCR-IN 1/8FVCR-O Injector1-TEOS VALVE, INJ. 208V TEPO/TEOS 150C STEC 2410A V-02H Injecto2r-TEOS VALVE, INJ. 208V TEPO/TEOS 150C STEC 2410A V-02H Injector3-EMPTY           EMPTY BLOCKER PLATE         BLOCKER, DD3328, SACVD 300MM FACEPLATE     FACEPLATE, 1.5D 12MIL .70THK, SACVD 300MM GASBOX          GAS BOX, REMOTE CLEAN, PRODUCER SE PUMPING RING            PUMPING RING, ASYMMETRIC, SACVD PRODUCER SE TOP LINER       TOP LINER, EC2, SACVD PRODUCER SE PUMPING CHANNEL, LEFT       PUMPING CHANNEL, ASYMMETRIC LEFT, SACVD PRODUCER SE PUMPING CHANNEL, RIGHT     PUMPING CHANNEL, ASYMMETRIC RIGHT, 300MM SACVD PRODUCER SE LIFT PINS         LIFT PIN 170 FIXED FLOATING 300MM PRODUCER SE LIFT RING         LIFT RING Fixed Floating 300MM PRODUCER SE LIFT HOOP, FIXED FLOATING   HOOP 140 FIXED FLOATING 300MM PRODUCER SE LIFT HOOP SCREW      SCREW PAN HEAD LIFT PIN LIFT HOOP WASHER    WASHER LIFT PIN

Specifications

ManufacturerAMAT
ModelProducer SE
ConditionUsed
Stock NumberOD20217