Ontrak Synergy Wafer Scrubber

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Description

Includes: Brush Box Refurbishment, Chemical line replacement, full cleaning and replacement of all wear items including but not limited to Belts, hoses, O-rings, seals, and/or solenoids/valves. New spin bowl, spindle assembly and spin nest. Configuration • 200mm (8-inch), Si wafers, Notched. • 110V, Single Phase, 60 HZ • CPU 30 • Standard Robot orientation • CE Style spin nest • Edge Clean Option • Solid State Hard Drive • 2.3.8 Software, Y2K Compliant • Megasonic Option • Three color Light tower • SECS-GEM • Thru-the floor facilities

Specifications

ManufacturerOktrak
ModelSynergy
ConditionUsed
Stock NumberTC0507201905
Wafer Size200mm