2004 Hitachi Kokusai Electric DD-1206VN-DM(Quixace1/QMN)

Hitachi Kokusai Electric DD-1206VN-DM(Quixace1/QMN)

• Diffusion Furnace
• Furnace: Quixace-Mini(Silica bake)
• Heater type: D4EX25085     RHC Heat(Quick-cooling) Exhaust pressure controller: RC-100
• Furnace mount Scavenger
• Process exhaust duct (2)Automation
• I/O shutter
• FOUP transfer unit FOUP loader
• Rotation FOUP rack unit: 12 step carrier stage FOUP OPENER unit
• Wafer detect unit Notch detect unit Wafer transfer unit
• Wafer chuck: 1 wafer + 4 wafer pitch convert Boat elevator unit: Up/Down
• Boat rotation unit Furnace shutter unit
• (3)Gas (N2, O2)
• Gas pressurize unit: Silica bake Gas detector
• Gas Box (4)Controller
• System controller: CX3010 Temperature controller: CQ1700
• Power control unit