2012 ASM International Eagle XP EmerALD

2012 ASM International Eagle XP EmerALD

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Description

ASM International Eagle XP EmerALD

ALD (Atomic Layer Deposition)

Currently Configured for 300mm wafer size

MFG Date: 2012

EQUIPMENT DETAILS:

Inspect to confirm configuration and condition.

Configuration :

Tool Model : XP Platform

System SW(OS) version is Ver 1. 58a1-001

All cables are present

Have missing /damaged parts need inspection to confirm.

Robot Type is Yawuski

Power Supply & AC Dist Box : P/N 1060-625-01

Backing Pump(s) : ALD/LL/WHC is EDWARDS-IXH1210

Heater Jacket : INTRACO TAIWAN CORPORATION

Facility Requirements :

CDA LLC PN2 : 403

DIW : 2.95

Vacuum Load Port vacuum : -86.2

Gas LLC Pressure : 0.56/0.209 MPA

FI : 100 Pa

Ar : 500 SCCM

N2 : 500 SCCM

Ar : 3 SLM

Differential : 3.5 Pa

Specifications

ManufacturerASM International
ModelEagle XP EmerALD
Year2012
ConditionUsed
Stock Numberem1199
WAFER SIZE300mm