2006 TSK UF3000

Currently Configured for 300mm wafer size

MFG Date: May, 2006

EQUIPMENT DETAILS:

Tool is a Cold temperature range prober.

X,Y Overall Accuracy：±2.0µm (Temp Stability ±1Ԩ

X,Y Stage Accuracy：±1.0µm

Z Axis Stroke(Applicable stroke)：37mm

Z Axis Control Accuracy：±2µm

Stage Durability：200kgf

Hot&COLD chuck

Chiller：SCU-600

Temp. Range：-40 to 150Ԩ

Tool was docked with an Advantest T5377S tester.

Missing or damaged parts: Not reported. Please inspect to confirm

INCLUDING A HINGE UNIT (MHF6000).

Notes:

Tool has been de-installed by the OEM.

Tool is currently located in an off-site warehouse.

Shipping brackets and kits are installed on tool for rigging and transportation.

No pictures provided. Please inspect to confirm. 

Hard DIsc not included