R2D Automation Comet 2 Station

Comet 2 station 1186

Wafer transfer System

The machine is currently set up for 6“

Using the COMET 2 STATION is the easiest way to transfer batch of wafers 3″ to 12″, from cassette to cassette or from cassette to boat. The batch can contain from 1 to 25 wafers to be transferred.

Simple to use and easy to maintain, the COMET 2 STATION is set up and controlled directly from the front panel keyboard. All electronic parts are compatible for all COMET machines.

The COMET 2 STATION is also compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine.

Peek material for pushers, retainers and boat adaptors

LCD display indicating all cycle steps.

IR heat sensor

Double cassette/boat sensors

Carrier correctly positioned (mechanical)

Wafer presence detection into cassette/boat

Current limit on all motors

Power “off” security

Open frame, designed for a vertical laminar flow

Automatic home position

Historical data recorded (error messages data time)

Clean room colour paper documentation