2013 HITACHI CG-4100

SEM - Critical Dimension (CD) Measurement

Metrology Equipment

Date of Manufacture: 2013-01-01

Currently Configured for: 300mm

Asset HDD not included

METROLOGY 15-3HITA_CG4100_SEMCD_01 HITACHI CG4100 SEMCD

Missing or Damaged parts: Fab confirmed there were no missing or damaged parts.

Vendor:HITACHI

S/N:4195-02

VID:VID761

SW Version:35.47

Resolution:1.8nm

throughput:42wafer/h

MAM Time:2.8sec

Stage Landing Accuracy:±1μm