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2006 TEL TRIAS
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TEL TRIAS 300mm
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Dielectric Etch Telius SP 305 DRM
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Make: Tokyo Electron Ltd.
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TEL Expedius
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Wet Station
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Vertical Anneal Furnace
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Make: Tokyo Electron Ltd. Quantity: (2) Vintage: 2007 (1) 2006 (1)
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TEL I/F Block (Mark8 - i11D) 200mm
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TEL I/F Block (Mark8 - i11D) Wafer size: 200mm Process: Track
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TEL ACT 12 Load ports
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Wafer Size: 300MM
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TEL P12XLn+
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Vintage: 2004,Nov Voltage: 200V AC Hot/Cold chuck Temp: 30~150 Gold/Nickel chuck:Nickel Hard Driv...
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TEL Certas Etch 12 inch Dry Clean
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Wafer Size: 12 inch
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TEL P12XL Prober 2008/2009
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Vintage 2009,Jun 2008.Oct Voltlage 200V AC Hot/Cold chuck Temp: Tri-Temp but no chiller(30~150) G...
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TEL TRIAS
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Wafer Size: 300MM
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TEL Trias Ru Linear Barrier CVD 300mm
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TEL P8 Prober VIP3
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Configuration Voltage: 220VAC Hot/Cold Chuck : Hot Gold/Nickel chuck: Gold HD & Floppy Drive: Yes...
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