Vintage 2011 Fully operational

Main Controller Type: TEL Controller #2 Wafer Flow: Right to Left Configuration A. Wafer Size:...

Good working condition - OCR- Hot chuck: 30 to 150- MHF 300 L Manipulator- Software: O/S: V2.15.OS

End station 93 x 107 x98 Analyzer, Source teminal 100 x 92 x 96 Power rack 110 x 32 x 89 Contr...

End station 120 x 95 x 102 Beam line 52 x 96 x 94 Source teminal 59 x 60 x 89 Source housing 6...

Description AST SUPER HEAT SYSTEM Year of Manufacture 1999 Tool Status Connected Wafer Size 20...