Process: sputter coater Condition: working Wafer size: multi

Process: lifetime measurement Condition: complete

Process: ICP etcher Wafer size: 12" Condition: as is

Wafer size; 8" Process: track Condition: part tool

Process: microscope Condition: complete (1) as is (1) Wafer size: 12"

Condition: as is Wafer size: 8" Process: track

Process: Preclean Etchx1, Oxide CVD x2 Condition: as is Wafer size: 8"

Process: Overlay Measurement Condition: as is Wafer size: 12"

Process: Macro Defect Inspection Condition: as is Wafer size: 12"

Process: Thickness Measurement Wafer size: 12" Condition: as is

Process: analyzing Condition: as is