Dose Monitoring system

- 6 spinning stations - 10+ hot & cold ovens/plates

The QFDS-1800 is an in-line, automated analysis and dosing system originally manufactured by ECI ...

1. General − Currently set for 6" wafers - Capable of 8" wafers − 1 Copper (Cu) Plating Chambe...

- Model: 870S SRD - Dual Stack SRD - PSC-108 Controllers - Vintage: 2010

Vintage = 2011 Process = RTP TCPP mainframe 200 mm SNNF 2 ea Tantalum oxide RTP process chamb...

- Model Flexifab - Currently set up for 6" Wafers - Automated Wafer Handling - Coater Module ...

- Model: EVG 101 - Semi-Automatic, with Manual loading - Suitable for wafer sizes 1" - 8" wafer...

- Model: Spectrum S-820 Precision Batch Dispensing System - Vintage: 2007 - DJ 9000 Dispense Head

Single chamber

Dual chamber

Wafer size: 12" <PM2> FLEX 45 (23F450455(F104683-PM2)) / 2007 RF Match: 853-040482-301 Pendul...