2004 Hitachi Kokusai Electric DD-1206VN-DM(Quixace1/QMN)
2004 Hitachi Kokusai Electric DD-1206VN-DM(Quixace1/QMN)
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Description
Hitachi Kokusai Electric DD-1206VN-DM(Quixace1/QMN)
- Diffusion Furnace
- Furnace: Quixace-Mini(Silica bake)
- Heater type: D4EX25085 RHC Heat(Quick-cooling) Exhaust pressure controller: RC-100
- Furnace mount Scavenger
- Process exhaust duct (2)Automation
- I/O shutter
- FOUP transfer unit FOUP loader
- Rotation FOUP rack unit: 12 step carrier stage FOUP OPENER unit
- Wafer detect unit Notch detect unit Wafer transfer unit
- Wafer chuck: 1 wafer + 4 wafer pitch convert Boat elevator unit: Up/Down
- Boat rotation unit Furnace shutter unit
- (3)Gas (N2, O2)
- Gas pressurize unit: Silica bake Gas detector
- Gas Box (4)Controller
- System controller: CX3010 Temperature controller: CQ1700
- Power control unit
Specifications
Manufacturer | Hitachi Kokusai Electric |
Model | DD-1206VN-DM(Quixace1/QMN) |
Year | 2004 |
Condition | Used |
Stock Number | em339 |
WAFER SIZE | 12 |