1994 AMAT Endura PVD 5500 150mm

Applied Materials Endura PVD 5500 - Metal deposition

Vintage: 1994

SN: 3321

Wafersize: 150mm

200mm convertible: Yes

6 inch

 Chamber1: Tin 101

Chamber2:Ti/Tin

Chamber3: AlSiCu

Chamber4: Ti/Tin

Chamber5: pastewafer

ChamberC: pre-clean

 ChamberD: degas

Cryo's: CT8F onboard

 Compressors: 3x 9600