ADE Episcan 1000 FT-IR

Measurement of Epi Films <25µ
ON-LINE TECHNOLOGIES 2110 Spectrometer Head
IRVINE OPTICAL Nanoloader II Dual Cassette Wafer Handler
ADE ACS Controller
Windows NT Operating System
Wafer Mapping
Scanning Stage
cassette to Cassette
100mm to 200mm wafer size.

• Wafer Size Range   Minimum 100 mm  Maximum 200 mm
• Wafer Mapping YES
• Scanning Stage YES
• Controller Type PC Controller Type
• Cassette to Cassette YES
• Other Information Measurement of Epi Films <25µ
• ON-LINE TECHNOLOGIES 2110 Spectrometer Head
• IRVINE OPTICAL Nanoloader II Dual Cassette Wafer Handler
• ADE ACS Controller
• Windows NT Operating System

Power Requirements 120 V