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Used ADVANCED ENERGY Apex RF generator 5513

5.5Kw

Used KLA Tencor 5400 FLEX

Know issue: Missing a vacuum sensor, but is in working condi5on outside of that part.

Used TEL P-12XL

12" Wafer As-is

Used Semix/Tazmo TR6132U

Used NIKON OPTIPHOT-200

8" As-is 3 available

Used 1993 SVG 8626/8636

4" As-is

Used 1993 SVG 8632-CTD-D

DEVELOPER AS IS

Used NOVELLUS C1

Used AMAT RF3

12! As-is

Used March Instruments PX1000E8 Plasma Asher / Etcher

Batch system for plasma cleaning or etching. Currently configured with one shelf set: 17 in. x 1...

Used 2000 TEL ACT8

2c4d 8" As is

Used THERMCO 5204 4 Stack horizonal Furnace

The furnace was manufactured in Orange, Ca, and later adapted by VSM. The loadstation is a 5110 ...