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2013 TEL LTI unit
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TEL, LTI unit Tool ID: LTI12007
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2012 AMAT UVC
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Process UVC process Missing/ Faulty Parts/ Accessories List: Boards, Heater p 2
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2012 AMAT UVC
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Tool Status Disconnected Wafer Size 300 mm Fab Section Thin Film Process UVC process Missing/...
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2012 AMAT UVC
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Tool Status Disconnected Wafer Size 300 mm Fab Section Thin Film Process UVC Process Missing/...
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1999 Ebara EPO-2228
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Tool Status Connected Wafer Size 200 mm Fab Section CMP Asset Description Ebara 222 Oxide CMP ...
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2011 Genmark Porta300P
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Genmark, Porta300P, 2 loadports with some spare parts Tool Status Disconnected Wafer Size 300 ...
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AMAT 0040-62020 CMP Retaining Rings
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AMAT, 300mm, CMP Retaining Rings Tool ID: CMP Retaining Rings
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2010 TEL Tactrus NCCP
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TEL, Tactrus NCCP, 300mm, Etch Connected in fab with 2 chms.
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2016 Oxford Instruments Opal
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Tool Status Connected Wafer Size NA Fab Section Lab Asset Description RF/Plasma oxide depositi...
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2001 KEITHLEY S475
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KEITHLEY, S425, Kerf Parametric Tester
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1996 AMAT P5000
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Wafer size: 200mm Fab section: thin film Asset description: precision 5000 CVD system Software...
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2001 KEITHLEY S425
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KEITHLEY, S425, Kerf Parametric Tester Tool ID: K259
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