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TEL TE5000S Plasma Etcher
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150MM Wafer Size: 150MM
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VM-8000J Particle Detector
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Particle Detector 5"
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RUDOLPH AUTOEL-IV Film Thickness Measurement Tool
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5"
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KLA-TENCOR SFS7600S Particle Counter
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KLA-TENCOR SFS7600S Particle Counter
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KLA-TENCOR SFS6200 Particle Counter
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Parts system
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NANOMETRICS NANOSPEC 180 Film Thickness Measurement Tool
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150MM
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RUDOLPH FE-IV D Film Thickness Measurement Tool
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150MM
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ULVAC Z-1000(Z-1201) PVD
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AlSix2 chamber. 150MM
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TEL TRIAS CVD
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W-Si x1 chamber. 12"
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TOK TSE306W Plasma Etcher
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150MM
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TEL TE8500 Plasma Etcher
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150MM
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TOK OPM-A1250 Asher
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150MM
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