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AMAT Vantage AP
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Annealer/ RTA/ RTP
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KLA- Tencor SP1-TBI
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Inspection/ measurement 8"
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Axcelis NV-GSD III
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Description Dimension End station 110x94x92 Analyzer, Power rack 50x37x89 Source teminal 48x69...
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Keysight 4073A
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12" Parametric tester
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Canon FPA-6000 ES5a
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3 available Stepper/ scanner
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Eaton NV-GSD-HE
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End station 115 x 94 x 98 Beam line 52 x 96 x 94 Source teminal 59 x 60 x 89 Source housing 66...
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TSK UF3000
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Prober 8 available
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1996 ASML 5500/100D
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Stepper / Scanner 2 available 1996
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AMAT VIISta HC
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Ion Implanter
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LAM Concept Three Speed
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1999 CVD
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2007 TEL P-12XLn+
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2 available 12" Vintage: 2007 Prober
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2004 Hitachi S9380
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2004 SEM
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