AMAT G5-MESA-PULSE Poly
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Wafer Size:
300
Process:
Poly
Config
EFEM, 3 LP, ATM, VHP, 3x DPS MESA chamber, 1x Axiom cha...
2008 Axcelis NV 8250 HT Ion Implanter
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8"
- 208 VAC
- 3 Phase
- 50/60 Hz
- Power: 36 kVA
- Input Breaker: 100 A
- Largest Load: 88...
2000 Varian Amat E500
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Back end medium current Implanter ConditionGood Year of Manufacture2000
2022 ONTO Dragonfly G3
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ONTO Dragonfly G 3 , 8"
- XPort 2-wide
- Objectives: 6 installed (5x, 10x, 20x, 50x, RTEC 2x, T...
1995 KLA Surfscan 6420 Particle Defect System
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- 220 V - 50 Hz - Single Phase - 16 A 1995 Vintage
Gasonics PEP3510 H Asher
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Robot Type: Yaskawa XU-RCM4700
Cassette: Asyst SMIF Indexer
MW Generator: Aixcon 2kw
Chamber: ...
2004 HITACHI S-4800 II
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Refurbished Hitachi S-4800 II.
Wafer : 200mm.
Vintage : 2004.
Secondary electron image resolut...











