Tool Status Connected Size 300 mm Fab Section Diffusion Asset Description Epsilon3200 Single W...

TEL, P12XLn, 300mm Tool Status Disconnected Wafer Size 300 mm Fab Section Test Asset Descript...

Tool status: Cold Shutdown Software version: 788 CIM: E84, SECS/GEM, GEM300 Hardware Configura...

Process UVC process Missing/ Faulty Parts/ Accessories List: Boards, Heater p 2

Tool Status Disconnected Wafer Size 300 mm Fab Section Thin Film Process UVC process Missing/...

Tool Status Disconnected Wafer Size 300 mm Fab Section Thin Film Process UVC Process Missing/...

Tool Status Connected Wafer Size 200 mm Fab Section CMP Asset Description Ebara 222 Oxide CMP ...

Genmark, Porta300P, 2 loadports with some spare parts Tool Status Disconnected Wafer Size 300 ...

AMAT, 300mm, CMP Retaining Rings Tool ID: CMP Retaining Rings

TEL, Tactrus NCCP, 300mm, Etch Connected in fab with 2 chms.

Tool Status Connected Wafer Size NA Fab Section Lab Asset Description RF/Plasma oxide depositi...

Wafer size: 200mm Fab section: thin film Asset description: precision 5000 CVD system Software...