Von Ardenne Sputter, 2 Cluster Tool - Model CF 850S, Turbo pump, Brooks Robot
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Used, looks complete
8 inch wafer
Von Ardenne cluster tool details
Huttinger PFG 3000 DC 09468...
Sencera In-line Sputter 6 target large panel DC power supply vacuum & Turbo pump
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Used
Sencera In-line Sputter, 6 target. large panel, working, complete, RF and DC power supply, ...
Alcatel AMS 4200, Deep Reactive Ion Etch (DRIE), RF Generator, Mag 7 Robot, Controller rack, etc
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200mm
Used, looks complete, very clean
Tool Configuration:
MFG Date: 2008
Deep Silicon Etch A...
Bruker scion gcms triple quad systems
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GC , autosampler, pc and pump included.
Autosampler: BR1212M302
GC: BR1211M616
Vacuum pump: 22...
