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MECS Atmospheric Wafer Handling Robot (ASM eagle-10)
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- UTX 1100 - 200mm - 2 - UTX 1200 - 200mm - 1
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MECS UTC 801P
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Atmospheric wafer handling robot (WJ-1000,1500) 200mm
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Transformer 3Phx400V 60HZ to 208V 1Ph, 90A
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Rena Casstte Spray Etcher
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150mm (without Semitool SRD)
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Alcatel 602E dual etch chamber system with handler
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MECS UTC 800
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Atmospheric wafer handling robot (WJ-999) 150/200mm
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Yaskawa XU RC350D-C61
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Atmospheric wafer robot (DNS SU-3000) 300mm
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Yaskawa XU RSM53EO
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Atmospheric wafer robot (Ebara Frex 300 CMP) 300mm
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Kawasaki Atmospheric Wafer Robot (AMAT Producer)
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3NX540B-A302 - 300mm - 1 NS410B-A002 - 300mm - 1
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Brooks Mag 8
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Vacuum robot (AMAT Producer GT) 300mm
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Brooks Mag 7 (for LAM Etching)
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Vacuum robot 002-1600-07 200/300mm
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Brooks Wafer Pre-Aligner
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PRE 300/300B - 300mm - 10 PRE 200/200B - 200mm - 3
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