2018 Atmospheric Process Plasma (APP) System with RFPT 600W 13.86mhz Rf power supply, and DX-VV auto match network

13.56MHz RF Generators (REX-Series)

RF Power: 300 W 600 W 1000 W

Reflected Power: 30 W 60 W 100 W

RF Connector: N-Type

Interface: Analog User port, RS-232C

Dimensions: 241(W)×480(L)×131(H))

13.56MHz Matching Units (DX-Series)

RF Power: 1500 W 3000 W 6000 W

Reflected Power: 150W 300W 600W

RF Connector: HN-Type HN-Type DIN-Type

Interface: AnalogUser port, RS-232C

Dimensions: 485(W)×520(L)×131(H)

Oxygen and Argon MFC's

Manufacture Date 10/2018