2005 ASML XT: 1250B

Tool Status: Running Wafers

Wafer Size: 300 mm

Fab Section: Lithography

Asset Description: ALC1332STP

Software Version: 4.1.0

CIM: SECS, GEM

Process: ARF

Hardware Configuration (FAB):

Main System: Main Frame - 1

Factory Interface: FOUP - 1

Handler System: ASML Reticle Handler - 1

Handler System: ASML Wafer Handler - 1

Options System: OIU Unix - 1

Hardware Configuration (SUBFAB/ AUXILIARY UNITS):

Cymer Laser XLA-165: 1

MAIN DISTRIBUTION CAB: 1

ELECTROCABINET #2: 1

ELECTROCABINET #3: 1

EXHAUST CABINET: 1

LENS CIRCUIT WATER CAB.: 1

MOTOR CIRCUIT WATER CAB: 1

AIR CONTROL CAB.: 1

PURGE HOOD BLOWER: 1