2010 Aixtron Crius II

No known missing parts, the equipment was in good condition when bought. 

Process: GaN

Batch size: 2" * 55ea/ 4" * 13ea/ 6" * 6ea

Electricity: 208/ 120V AC,3 Phase

Heater Voltage: 380V AC,3 Phase

Wiring: 4 wire + Ground

Temperature Monitor: ARGUS x1

Hydride Lines: NH3_1 / NH3_2 / SiH4 

MO Source: TMGa-1,TMGa-3,TEGa2, Cp2Mg-1, Cp2Mg-2,

TMIn-1, TMAl-1 (7)

Bath: 2 sets of RE235 RAUDA bath

4 sets of NOAH Precision

MFC Type: Horiba Z500

Pump: Scroll pump*1

Chiller: Affinity