Accretech/TSK UF3000

Currently configured for: 300mm

Asset HDD not included

UF3000 PROBER

X,Y Overall Accuracy：±2.0µm (Temp Stability ±1℃

X,Y Stage Accuracy：±1.0µm

Z Axis Stroke(Applicable stroke)：37mm

Z Axis Control Accuracy：±2µm

Stage Durability：200kgf

Hot&COLD chuck

Chiller：SCU-600

Temp. Range：-40 to 150℃

Tool was connected with a T5377S tester before de-installation.

HINGE INCLUDED IN TOOL. MODLE: MHF6000.