2008 DNS SU-3000

Currently Configured for: 300mm

Asset HDD not included

Shipping brackets and kits will need to be supplied by the buyer.

[Chamber A]

 Chemical : SST-A47 , 35 deg

 Rinse(front/back) :DIW/ CO2 injection ,resistivity <1M?

 Spin dry ,2500rpm

 Chuck type : mechanical Chuck

[Chamber B]

 Chemical : SST-A47 , 35 deg

 Rinse(front/back) :DIW/ CO2 injection ,resistivity <1M?

 Spin dry ,2500rpm

 Chuck type : mechanical Chuck

[Chamber C]

 Chemical : SST-A47 , 35 deg

 Rinse(front/back) :DIW/ CO2 injection ,resistivity <1M?

 Spin dry ,2500rpm

 Chuck type : mechanical Chuck

[Chamber D]

 Chemical : SST-A47 , 35 deg

 Rinse(front/back) :DIW/ CO2 injection ,resistivity <1M?

 Spin dry ,2500rpm

 Chuck type : mechanical Chuck

Other options

 Chemilcal filter for acid removal

Missing or damaged parts: Not reported.