DNS / DAINIPPON 80B Coater Developer

Working condition, no missing parts.

System configuration:

Coater Side

• 3-Coat (1-BARC, 2-Resist)
• 2-Nozzle BARC, 4-Nozzle Resist
• 2-LPAH (Low Pressure HMDS)
• 8-Soft Bake Hot Plates (250℃)
• 6-Chill Plate

Developer Side

• 3-Develop
• 2-SI Nozzle + Prewet
• 2-EEW (Optical Edge Exposure)
• 6-PEB Hot Plates
• 2-Chill Plate