2000 Applied Materials VSE - VIIsion

Tool called `HS25` - supposed to leave the cleanroom middle of April22

USED AMAT VSE - VIIsion  

Part Name / Category  

General:  

Model/TypeViision 200+ 

Manufacturing Year2000  

WaferSize150mm (6 Inch) Implant Disc18 Site, Silicon Coated 

Two-dimensional beam profiler  

CE-Markyes 

Average Uptime85%    

Computer System147MHz Main & ES CPU 

and Software 6.246.24 (needs a paid License from AMAT from new owner!) 

Cleanroom MonitorTFT 

Remote Service MonitorTFT    

Gasbox: calibrated for:

String #1 - SDSUnit 166210 sccm Arsenic 

String #2 - SDSUnit 166210 sccm Arsenic 

String #3 - HPUnit 1660100 sccm N2

String #4 - HPMKS P2A10 sccm Boron

External Inert Gas Feed and Purge     

Source/Beamline  

Source Chamber Shield Kit yes1 included

Bernas Ion Source yes1 included

Mass Slit Shield Retrofit     

Implant:  

New Infranor Amplifier Xtra PulsyesUpgraded 03/2018

Spin Amp Kollmorgen Servo StaryesUpgraded 05/2018