Prior Scientific HR05/5 motorized 6x6 XY shuttle stage for Olympus wafer loader

Prior Scientific HR05/5 motorized 6x6 XY shuttle stage for Olympus wafer loader

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Description

H105 Motorized 6"x6" XY wafer shuttle stage configured to interface with Olympus wafer loader for 4"-6" wafers


Wafer may be scanned using joystick or preprogrammed pattern


Includes H152KP combination joystick/keyboard/LCD display and H128PNU4 controller with RS232 interface

Specifications

ManufacturerPrior Scientific
ModelHR05/5 motorized 6x6 XY shuttle stage for Olympus wafer loader
ConditionRefurbished
Stock NumberGOD2308201975139191