2000 AMAT Mirra Mesa
2000 AMAT Mirra Mesa
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Description
Summary Specifications:
- 200mm Orientation Flat
- Process: Oxide
- x3 Platen (x2 IC PAD + x1 Buff PAD+DIW)
- x2 DHF Brush Cleaning
- HCLU (Head Load/Unload Unit)
- Ultrasonic Cleaning
- SRD (Spin Rinser & Dryer)
- MEGCON
- System AC Rack
- FABS I/F
- TAZMO Slurry Supply System MX2000
Specifications
| Manufacturer | AMAT |
| Model | Mirra Mesa |
| Year | 2000 |
| Condition | Used |
| Stock Number | GOD24032022 |
| WAFER SIZE | 200mm |