AMAT P5000 2 chamber nitride PECVD tool

as is tool,

RF Generators Missing, we can supply the RF Generators within the asking price (as is)

Gasses: {SiH4, N2O, NH3, N2, NF3} + {SiH4, N2}

Updated 27th May 2022:

I inspect the P5000 today and I take pictures and video

The supplier bought this p5000 in 2011 from Japan

I can’t find big missing parts but this tool has several missing parts

Missing parts: Video B/D, chamber #A Gas line with MFC, air valve, Chamber #A, #B Chamber signal cable and AMAT-1

WDB is old version, I think you need change WDB,, (I have one new type ^^ )

Monitor also old version .

They want to sell as-is condition.

of course they will give you 2 generator later.