2005 AMAT Reflexion LK - Poly/STI

Poly/STI CMP

CMP Equipment

Currently Configured for: 300mm

Asset HDD not included

EQUIPMENT DETAILS:

Tool Status: Deinstalled and moved to the warehouse.

Configuration: Audit to verify.

CMP 6-3AMAT_REFL_POLY AMAT REFL POLY

OEM                                 AMAT

Tool Model                      Reflexion LK

Process                             POLY

Software Version            lp384.8_52

                                           208v 3 Ø 60Hz

Loading Configuration    3 load ports (TDK)

System Configuration Description:

1 Polisher – 3 platens

2 Polisher – 4 carriers (contour)

3 Polisher – 8 UPAs (G4+)

4 Polisher – P1 slurry controllers: 50-500ml/min (x2)

5 Polisher – P2 slurry controllers: 50-500ml/min (x2)

6 Polisher – P3 slurry controllers: 50-500ml/min (x2)

7 Cleaner – Running Beam

8 Cleaner – Input, Buffer, Megasonics, Brush Box 1, Brush Box 2, Dryer (Desica – Marangoni)

Missing Parts:

Description                                                                                                Missing (qty)

ASSY, POLISHER DC POWER SUPPLY (AMAT: 0010-63313)               1